rus
DOI: 10.22184/1992-4178.2024.232.1.64.69
Recently, a number of minifab projects for microelectronic production have been created in Russia and abroad. The article considers the concept of minifabs and the prospects for implementing projects in this area.
Recently, a number of minifab projects for microelectronic production have been created in Russia and abroad. The article considers the concept of minifabs and the prospects for implementing projects in this area.
Теги: fab 100/150 project futrfab halca microelectronic production minifab nanofab-100 микроэлектронное производство минифаб проект fab 100/150
MINIFABS IN MICROELECTRONICS: HISTORY AND OPPORTUNITIES
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