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To reduce the cost of polysilicon materials containing silicon dioxide as a raw material are proposed to be used. The article describes the process of silica chlorination in a molten salt and the raw materials used. It determines the main raw materials usage, their cost in a traditional and proposed new polysilicon production technology. It provides the comparative analysis of calculated values.
DOI: 10.22184/1992-4178.2019.187.6.154.160
DOI: 10.22184/1992-4178.2019.187.6.154.160
Теги: polycrystalline silicon salt chlorinator silica silicon dioxide trichlorosilane диоксид кремния кремнезем поликристаллический кремний солевой хлоратор трихлорсилан
Molten salt chlorination in a polycrystalline silicon production technology
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